E-beam resist pattern quality after CPD Process NRL Nano Fab - Washingtopn, DC
Resistive IR Emitter Device MCNC
Array of low stress silicon nitride coupled oscillators with gold actuation leads. 1,100x Cornell Nanoscale Facility and Department of Applied Physics, USA
RF MEMS Device Middle East Technical University, Turkey
Date: May 18-19, 2024
Location: Yancheng Guest House (No.1 Tianshan Road), Tinghu District, Yancheng City, China